Glycol-based sol-gel process for the fabrication of ferroelectric PZT thin films - Code: EP28

Carine Livage, Ahmad Safari, Lisa Klein

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

A new sol-gel system using ethylene glycol was developed for the fabrication of PZT thin films with compositions near the morphotropic phase boundary Pb(Zr0.52Ti0.48)O3. Ethylene glycol was used as both a chelating agent and a solvent to replace the highly toxic methoxyethanol used in previous formulations. Thin films were deposited by spin coating the solutions onto platinized silicon substrates. Films were completely crystallized by about 600°C and contained the ferroelectric perovskite phase. A dielectric constant of about 750-800 at 1 KHz was obtained for thin films of 0.3 μm thickness. The hysteresis measurements revealed a remanent polarization of 15 mC/cm2 with a coercive field of 60 kV/cm.

Original languageEnglish (US)
Pages (from-to)605-609
Number of pages5
JournalJournal of Sol-gel Science and Technology
Volume2
Issue number1-3
DOIs
StatePublished - Jan 1 1994

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

Keywords

  • ethylene glycol
  • film: PZT
  • film: ferroelectric

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