High performance 4H-SiC single photon avalanche diode operating at solar blind wavelength

Xiaobin Xin, Jun Hu, Petre Alexandov, Jian H. Zhao, Brenda L. VanMil, D. Kurt Gaskill, Kok Keong Lew, Rachael Myers-Ward, Charles Eddy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

A 4H-SiC SPAD with an off-mesa bonding pad operating at 280nm is presented in this paper, with a low dark count rate of 14kHz and 27kHz at single photon detection efficiency of 1.9% and 2.6%, respectively. The device has a low breakdown voltage of 117V and a low dark current of 17fA, 49fA and 147fA at 50%, 90%, and 95% of breakdown voltage, respectively. The quantum efficiency is measured to be 28% (32%) at 280nm (270nm) with a UV to visible rejection ratio >1400 (>1600).

Original languageEnglish (US)
Title of host publicationAdvanced Photon Counting Techniques II
DOIs
StatePublished - Dec 1 2007
EventAdvanced Photon Counting Techniques II - Boston, MA, United States
Duration: Sep 9 2007Sep 11 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6771
ISSN (Print)0277-786X

Other

OtherAdvanced Photon Counting Techniques II
CountryUnited States
CityBoston, MA
Period9/9/079/11/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Avalanche
  • Dark count
  • Detection efficiency
  • Quantum efficiency
  • SPAD
  • Single photon counting
  • Solar blind

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  • Cite this

    Xin, X., Hu, J., Alexandov, P., Zhao, J. H., VanMil, B. L., Gaskill, D. K., Lew, K. K., Myers-Ward, R., & Eddy, C. (2007). High performance 4H-SiC single photon avalanche diode operating at solar blind wavelength. In Advanced Photon Counting Techniques II [677114] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6771). https://doi.org/10.1117/12.752683