High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions

Evelyn L. Hu, Lawrence D. Jackel, Richard E. Howard

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

Superconducting tunnel junction devices as small as 10–10 cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.

Original languageEnglish (US)
Pages (from-to)1382-1385
Number of pages4
JournalIEEE Transactions on Electron Devices
Volume28
Issue number11
DOIs
Publication statusPublished - Nov 1981
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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