High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions

Evelyn L. Hu, Lawrence D. Jackel, Richard E. Howard

Research output: Contribution to journalArticle

6 Scopus citations


Superconducting tunnel junction devices as small as 10–10 cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.

Original languageEnglish (US)
Pages (from-to)1382-1385
Number of pages4
JournalIEEE Transactions on Electron Devices
Issue number11
Publication statusPublished - Nov 1981
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this