High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions

Evelyn L. Hu; Lawrence D. Jackel; Richard E. Howard

doi:10.1109/T-ED.1981.20618

High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions

Evelyn L. Hu, Lawrence D. Jackel, Richard E. Howard

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Superconducting tunnel junction devices as small as 10–10 cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.

Original language	English (US)
Pages (from-to)	1382-1385
Number of pages	4
Journal	IEEE Transactions on Electron Devices
Volume	28
Issue number	11
DOIs	https://doi.org/10.1109/T-ED.1981.20618
State	Published - Nov 1981
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/T-ED.1981.20618

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title = "High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions",

abstract = "Superconducting tunnel junction devices as small as 10–10 cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.",

author = "Hu, {Evelyn L.} and Jackel, {Lawrence D.} and Howard, {Richard E.}",

year = "1981",

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AU - Jackel, Lawrence D.

AU - Howard, Richard E.

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AB - Superconducting tunnel junction devices as small as 10–10 cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.

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JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

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High Resolution Techniques for the Fabrication of Small Area Josephson Tunnel Junctions

Abstract

All Science Journal Classification (ASJC) codes

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