The fabrication of multilayer Josephson structures based on high-Tc thin films is reported. YBa2Cu3Ox thin films are prepared by in-situ rf magnetron sputtering. SIS and SNS edge junctions were produced. In the first case an intermediate layer withstands the high temperature process of the upper HTSC layer deposition. In the second one an Ag film is used as a normal layer which should be deposited in the last turn because of rapid Ag diffusion. Edge junctions with artificial barriers occured to be preferable. The Rs value of the YBCO/Ag boundary does not exceed 10-10 Ohm.cm2 being sufficient for SNS junctions use in SQUIDs. SIS structures with artificial barrier show Josephson weak link properties.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Physics and Astronomy(all)