Hollow glass waveguides with CVD-deposited metal and dielectric coatings

Yuji Matsuura, James A. Harrington

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


Hollow glass waveguides have been fabricated for the delivery of infrared radiation by chemical vapor deposition methods. A molybdenum film is first deposited inside 700- micrometer and 530-micrometer bore silica tubing by the hydrogen reduction of molybdenum chloride. Then, Al 2O 3, or TiO 2 film is deposited onto the molybdenum layer. These dielectric films enhance the reflectivity, and we observe a reduction in loss for the thin- film combination compared with the molybdenum film alone. The thickness uniformity of the dielectric films is estimated to be less than 5% of the desired thickness in a length of 50 cm. A loss spectrum of the Al 2O 3/Mo-coated waveguides shows that the losses for the Al 2O 3 guide in the 3 - 6 micrometer wavelength region are lower than the loss for the AgI-coated guide fabricated by liquid-phase deposition technique. The chemical vapor deposition techniques can be extended to the fabrication of hollow waveguides with multiple dielectric layers that have much lower losses than current single-layer designs.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsAbraham Katzir, James A. Harrington
Number of pages8
StatePublished - 1996
EventBiomedical Fiber Optics - San Jose, CA, USA
Duration: Jan 31 1996Jan 31 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherBiomedical Fiber Optics
CitySan Jose, CA, USA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Hollow glass waveguides with CVD-deposited metal and dielectric coatings'. Together they form a unique fingerprint.

Cite this