Abstract
Chemical etching is sensitive to a number of process variables which need to be maintained in a certain relationship to achieve good quality product. We describe an intelligent control system to support chemical etch processes. The system serves simultaneously two purposes: first it dispenses on-line expert advice on how to control chemical etching and, secondly, it constitutes a repository of qualitative knowledge and thus serves to codify the folklore of alkaline etch control. The expert system has been prototyped using PROLOG and installed on the factory floor.
Original language | English (US) |
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Pages | 889-891 |
Number of pages | 3 |
DOIs | |
State | Published - 1989 |
Externally published | Yes |
Event | 1989 IEEE International Conference on Control and Applications, ICCON 1989 - Jerusalem, Israel Duration: Apr 3 1989 → Apr 6 1989 |
Conference
Conference | 1989 IEEE International Conference on Control and Applications, ICCON 1989 |
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Country/Territory | Israel |
City | Jerusalem |
Period | 4/3/89 → 4/6/89 |
All Science Journal Classification (ASJC) codes
- Process Chemistry and Technology
- Artificial Intelligence
- Control and Systems Engineering
- Control and Optimization