Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

Emil A. Kneer, Dunbar P. Birnie, R. D. Schrimpf, J. C. Podlesny, G. Teowee

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

Original languageEnglish (US)
Pages (from-to)61-73
Number of pages13
JournalIntegrated Ferroelectrics
Volume7
Issue number1-4
DOIs
StatePublished - Feb 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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