Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators

Ying Wu, Qingze Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

20 Citations (Scopus)

Abstract

In this article, an inversion-based iterative control (IIC) approach is used to compensate for both the hysteresis and the vibrational dynamics effects of piezo actuators during high-speed, large-range tracking. We use the Hammerstein model to capture the piezo's input-output behavior and to show the convergence of the iterative control algorithm. The IIC approach is illustrated by applying it to a piezo scanner on a Atomic Force Microscope, and experimental results are presented to demonstrate the efficacy of the IIC technique in accounting for both the hysteresis and vibrational dynamics effects in high-speed, large-range tracking.

Original languageEnglish (US)
Title of host publicationProceedings of the 2006 American Control Conference
Pages424-429
Number of pages6
StatePublished - Dec 1 2006
Externally publishedYes
Event2006 American Control Conference - Minneapolis, MN, United States
Duration: Jun 14 2006Jun 16 2006

Publication series

NameProceedings of the American Control Conference
Volume2006
ISSN (Print)0743-1619

Other

Other2006 American Control Conference
CountryUnited States
CityMinneapolis, MN
Period6/14/066/16/06

Fingerprint

Hysteresis
Actuators
Microscopes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Wu, Y., & Zou, Q. (2006). Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. In Proceedings of the 2006 American Control Conference (pp. 424-429). [1655393] (Proceedings of the American Control Conference; Vol. 2006).
Wu, Ying ; Zou, Qingze. / Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. Proceedings of the 2006 American Control Conference. 2006. pp. 424-429 (Proceedings of the American Control Conference).
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Wu, Y & Zou, Q 2006, Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. in Proceedings of the 2006 American Control Conference., 1655393, Proceedings of the American Control Conference, vol. 2006, pp. 424-429, 2006 American Control Conference, Minneapolis, MN, United States, 6/14/06.

Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. / Wu, Ying; Zou, Qingze.

Proceedings of the 2006 American Control Conference. 2006. p. 424-429 1655393 (Proceedings of the American Control Conference; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Wu Y, Zou Q. Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. In Proceedings of the 2006 American Control Conference. 2006. p. 424-429. 1655393. (Proceedings of the American Control Conference).