Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators

Ying Wu, Qingze Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

20 Scopus citations

Abstract

In this article, an inversion-based iterative control (IIC) approach is used to compensate for both the hysteresis and the vibrational dynamics effects of piezo actuators during high-speed, large-range tracking. We use the Hammerstein model to capture the piezo's input-output behavior and to show the convergence of the iterative control algorithm. The IIC approach is illustrated by applying it to a piezo scanner on a Atomic Force Microscope, and experimental results are presented to demonstrate the efficacy of the IIC technique in accounting for both the hysteresis and vibrational dynamics effects in high-speed, large-range tracking.

Original languageEnglish (US)
Title of host publicationProceedings of the 2006 American Control Conference
Pages424-429
Number of pages6
StatePublished - Dec 1 2006
Externally publishedYes
Event2006 American Control Conference - Minneapolis, MN, United States
Duration: Jun 14 2006Jun 16 2006

Publication series

NameProceedings of the American Control Conference
Volume2006
ISSN (Print)0743-1619

Other

Other2006 American Control Conference
CountryUnited States
CityMinneapolis, MN
Period6/14/066/16/06

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Wu, Y., & Zou, Q. (2006). Iterative control approach to compensate for the hysteresis and the vibrational dynamics effects of piezo actuators. In Proceedings of the 2006 American Control Conference (pp. 424-429). [1655393] (Proceedings of the American Control Conference; Vol. 2006).