Laser-induced reactions of platinum and other metal films with silicon

J. M. Poate; H. J. Leamy; T. T. Sheng; G. K. Celler

doi:10.1063/1.90244

Laser-induced reactions of platinum and other metal films with silicon

J. M. Poate, H. J. Leamy, T. T. Sheng, G. K. Celler

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

We have reacted thin Pt, Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG laser pulses of 100-nsec duration in the power range 18-50 MW cm^-2. The layers are laterally very uniform in thickness but are not single phase. Average composition of the reaction product layer can be changed over a wide range by varying film thickness and laser power. The microstructure of the reacted layers indicates that reaction occurs via surface melting, mixing, and rapid resolidification.

Original language	English (US)
Pages (from-to)	918-920
Number of pages	3
Journal	Applied Physics Letters
Volume	33
Issue number	11
DOIs	https://doi.org/10.1063/1.90244
State	Published - 1978
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.90244

Cite this

@article{ba89d436c1d2485fb3763f25d7932e86,

title = "Laser-induced reactions of platinum and other metal films with silicon",

abstract = "We have reacted thin Pt, Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG laser pulses of 100-nsec duration in the power range 18-50 MW cm-2. The layers are laterally very uniform in thickness but are not single phase. Average composition of the reaction product layer can be changed over a wide range by varying film thickness and laser power. The microstructure of the reacted layers indicates that reaction occurs via surface melting, mixing, and rapid resolidification.",

author = "Poate, {J. M.} and Leamy, {H. J.} and Sheng, {T. T.} and Celler, {G. K.}",

year = "1978",

doi = "10.1063/1.90244",

language = "English (US)",

volume = "33",

pages = "918--920",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "11",

}

TY - JOUR

T1 - Laser-induced reactions of platinum and other metal films with silicon

AU - Poate, J. M.

AU - Leamy, H. J.

AU - Sheng, T. T.

AU - Celler, G. K.

PY - 1978

Y1 - 1978

N2 - We have reacted thin Pt, Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG laser pulses of 100-nsec duration in the power range 18-50 MW cm-2. The layers are laterally very uniform in thickness but are not single phase. Average composition of the reaction product layer can be changed over a wide range by varying film thickness and laser power. The microstructure of the reacted layers indicates that reaction occurs via surface melting, mixing, and rapid resolidification.

AB - We have reacted thin Pt, Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG laser pulses of 100-nsec duration in the power range 18-50 MW cm-2. The layers are laterally very uniform in thickness but are not single phase. Average composition of the reaction product layer can be changed over a wide range by varying film thickness and laser power. The microstructure of the reacted layers indicates that reaction occurs via surface melting, mixing, and rapid resolidification.

UR - http://www.scopus.com/inward/record.url?scp=0042798282&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042798282&partnerID=8YFLogxK

U2 - 10.1063/1.90244

DO - 10.1063/1.90244

M3 - Article

AN - SCOPUS:0042798282

SN - 0003-6951

VL - 33

SP - 918

EP - 920

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Laser-induced reactions of platinum and other metal films with silicon

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this