Laser-induced reactions of platinum and other metal films with silicon

J. M. Poate, H. J. Leamy, T. T. Sheng, G. K. Celler

Research output: Contribution to journalArticlepeer-review

76 Scopus citations


We have reacted thin Pt, Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG laser pulses of 100-nsec duration in the power range 18-50 MW cm-2. The layers are laterally very uniform in thickness but are not single phase. Average composition of the reaction product layer can be changed over a wide range by varying film thickness and laser power. The microstructure of the reacted layers indicates that reaction occurs via surface melting, mixing, and rapid resolidification.

Original languageEnglish (US)
Pages (from-to)918-920
Number of pages3
JournalApplied Physics Letters
Issue number11
StatePublished - 1978
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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