LASER PROCESSING OF POROUS SILICON.

H. Baumgart, R. C. Frye, L. E. Trimble, H. J. Leamy, G. K. Celler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
Pages609-614
Number of pages6
Publication statusPublished - Dec 1 1982
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume4
ISSN (Print)0272-9172

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Baumgart, H., Frye, R. C., Trimble, L. E., Leamy, H. J., & Celler, G. K. (1982). LASER PROCESSING OF POROUS SILICON. In Materials Research Society Symposia Proceedings (pp. 609-614). (Materials Research Society Symposia Proceedings; Vol. 4).