LASER PROCESSING OF POROUS SILICON.

H. Baumgart, R. C. Frye, L. E. Trimble, H. J. Leamy, G. K. Celler

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Pages	609-614
Number of pages	6
State	Published - 1982
Externally published	Yes

Name	Materials Research Society Symposia Proceedings
Volume	4
ISSN (Print)	0272-9172

All Science Journal Classification (ASJC) codes

@inproceedings{5dfb167205c847c4b724d577c665e44e,

title = "LASER PROCESSING OF POROUS SILICON.",

author = "H. Baumgart and Frye, {R. C.} and Trimble, {L. E.} and Leamy, {H. J.} and Celler, {G. K.}",

year = "1982",

language = "English (US)",

isbn = "0444006931",

series = "Materials Research Society Symposia Proceedings",

pages = "609--614",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - LASER PROCESSING OF POROUS SILICON.

AU - Baumgart, H.

AU - Frye, R. C.

AU - Trimble, L. E.

AU - Leamy, H. J.

AU - Celler, G. K.

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020274597&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020274597&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0020274597

SN - 0444006931

T3 - Materials Research Society Symposia Proceedings

SP - 609

EP - 614

BT - Materials Research Society Symposia Proceedings

ER -