Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

Zinan Zhao; Xiangnan Pang; Zhenghua Qian; Iren Kuznetsova; Tingfeng Ma; Yook Kong Yong

doi:10.1109/TUFFC.2020.2981645

Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

Zinan Zhao, Xiangnan Pang, Zhenghua Qian, Iren Kuznetsova, Tingfeng Ma, Yook Kong Yong

Engn-Civil & Environ Engn

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Mode-coupled vibrations in an ultra-high frequency (UHF) ZnO thin film bulk acoustic resonator (FBAR) operating at thickness-extensional (TE) mode are studied by employing weak boundary conditions (WBCs), constructed based on Saint-Venant's principle and mixed variational principle in the piezoelectric theory. The frequency spectra, describing the lateral size-dependence of mode couplings between the main mode (TE) and undesirable eigen-modes, for clamped lateral edges are compared with the existing frequency spectra for free lateral edges to illustrate the boundary influence. The displacement and stress variations in FBAR volume are also presented to intuitionally understand and distinguish the difference of frequency spectra between these two different lateral edges, and then we discuss how to select outstanding lateral sizes to weaken the mounting effect. The frequency spectra predicted from our approximate WBCs are also compared with and agree well with those predicted by the finite element method (FEM) using COMSOL, which proves the correctness and accuracy of our theoretical method. These results indicate that the WBCs could have potentials in the valid predictions of lateral size-dependence of mode couplings in piezoelectric acoustic wave devices.

Original language	English (US)
Article number	9040669
Pages (from-to)	1647-1655
Number of pages	9
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	67
Issue number	8
DOIs	https://doi.org/10.1109/TUFFC.2020.2981645
State	Published - Aug 2020

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

Keywords

Lateral size-dependence
mode coupling
mounting effect
spurious modes
weak boundary condition (WBC)

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10.1109/TUFFC.2020.2981645

Cite this

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title = "Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect",

abstract = "Mode-coupled vibrations in an ultra-high frequency (UHF) ZnO thin film bulk acoustic resonator (FBAR) operating at thickness-extensional (TE) mode are studied by employing weak boundary conditions (WBCs), constructed based on Saint-Venant's principle and mixed variational principle in the piezoelectric theory. The frequency spectra, describing the lateral size-dependence of mode couplings between the main mode (TE) and undesirable eigen-modes, for clamped lateral edges are compared with the existing frequency spectra for free lateral edges to illustrate the boundary influence. The displacement and stress variations in FBAR volume are also presented to intuitionally understand and distinguish the difference of frequency spectra between these two different lateral edges, and then we discuss how to select outstanding lateral sizes to weaken the mounting effect. The frequency spectra predicted from our approximate WBCs are also compared with and agree well with those predicted by the finite element method (FEM) using COMSOL, which proves the correctness and accuracy of our theoretical method. These results indicate that the WBCs could have potentials in the valid predictions of lateral size-dependence of mode couplings in piezoelectric acoustic wave devices.",

keywords = "Lateral size-dependence, mode coupling, mounting effect, spurious modes, weak boundary condition (WBC)",

author = "Zinan Zhao and Xiangnan Pang and Zhenghua Qian and Iren Kuznetsova and Tingfeng Ma and Yong, {Yook Kong}",

note = "Funding Information: Manuscript received December 13, 2019; accepted March 15, 2020. Date of publication March 18, 2020; date of current version July 24, 2020. This work was supported in part by the National Natural Science Foundation of China under Grant 11502108, Grant 1611530686, and Grant 11772163, in part by the State Key Laboratory of Mechanics and Control of Mechanical Structures at Nanjing University of Aeronautics and Astronautics (NUAA) under Grant MCMS-E-0520K02, in part by the Key Laboratory of Impact and Safety Engineering, Ministry of Education at Ningbo University under Grant CJ201904, and in part by the Funding for Outstanding Doctoral Dissertation in NUAA under Grant BCXJ18-01. The work of Iren Kuznetsova was supported in part by the Russian Ministry of Science and Education. (Corresponding author: Zhenghua Qian.) Zinan Zhao and Zhenghua Qian are with the State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China (e-mail: zinan_zhao. . com; qianzh. . uaa.edu.cn). Publisher Copyright: {\textcopyright} 1986-2012 IEEE.",

year = "2020",

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doi = "10.1109/TUFFC.2020.2981645",

language = "English (US)",

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pages = "1647--1655",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect. / Zhao, Zinan; Pang, Xiangnan; Qian, Zhenghua; Kuznetsova, Iren; Ma, Tingfeng; Yong, Yook Kong.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 67, No. 8, 9040669, 08.2020, p. 1647-1655.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

AU - Zhao, Zinan

AU - Pang, Xiangnan

AU - Qian, Zhenghua

AU - Kuznetsova, Iren

AU - Ma, Tingfeng

AU - Yong, Yook Kong

N1 - Funding Information: Manuscript received December 13, 2019; accepted March 15, 2020. Date of publication March 18, 2020; date of current version July 24, 2020. This work was supported in part by the National Natural Science Foundation of China under Grant 11502108, Grant 1611530686, and Grant 11772163, in part by the State Key Laboratory of Mechanics and Control of Mechanical Structures at Nanjing University of Aeronautics and Astronautics (NUAA) under Grant MCMS-E-0520K02, in part by the Key Laboratory of Impact and Safety Engineering, Ministry of Education at Ningbo University under Grant CJ201904, and in part by the Funding for Outstanding Doctoral Dissertation in NUAA under Grant BCXJ18-01. The work of Iren Kuznetsova was supported in part by the Russian Ministry of Science and Education. (Corresponding author: Zhenghua Qian.) Zinan Zhao and Zhenghua Qian are with the State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China (e-mail: zinan_zhao. . com; qianzh. . uaa.edu.cn). Publisher Copyright: © 1986-2012 IEEE.

PY - 2020/8

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N2 - Mode-coupled vibrations in an ultra-high frequency (UHF) ZnO thin film bulk acoustic resonator (FBAR) operating at thickness-extensional (TE) mode are studied by employing weak boundary conditions (WBCs), constructed based on Saint-Venant's principle and mixed variational principle in the piezoelectric theory. The frequency spectra, describing the lateral size-dependence of mode couplings between the main mode (TE) and undesirable eigen-modes, for clamped lateral edges are compared with the existing frequency spectra for free lateral edges to illustrate the boundary influence. The displacement and stress variations in FBAR volume are also presented to intuitionally understand and distinguish the difference of frequency spectra between these two different lateral edges, and then we discuss how to select outstanding lateral sizes to weaken the mounting effect. The frequency spectra predicted from our approximate WBCs are also compared with and agree well with those predicted by the finite element method (FEM) using COMSOL, which proves the correctness and accuracy of our theoretical method. These results indicate that the WBCs could have potentials in the valid predictions of lateral size-dependence of mode couplings in piezoelectric acoustic wave devices.

AB - Mode-coupled vibrations in an ultra-high frequency (UHF) ZnO thin film bulk acoustic resonator (FBAR) operating at thickness-extensional (TE) mode are studied by employing weak boundary conditions (WBCs), constructed based on Saint-Venant's principle and mixed variational principle in the piezoelectric theory. The frequency spectra, describing the lateral size-dependence of mode couplings between the main mode (TE) and undesirable eigen-modes, for clamped lateral edges are compared with the existing frequency spectra for free lateral edges to illustrate the boundary influence. The displacement and stress variations in FBAR volume are also presented to intuitionally understand and distinguish the difference of frequency spectra between these two different lateral edges, and then we discuss how to select outstanding lateral sizes to weaken the mounting effect. The frequency spectra predicted from our approximate WBCs are also compared with and agree well with those predicted by the finite element method (FEM) using COMSOL, which proves the correctness and accuracy of our theoretical method. These results indicate that the WBCs could have potentials in the valid predictions of lateral size-dependence of mode couplings in piezoelectric acoustic wave devices.

KW - Lateral size-dependence

KW - mode coupling

KW - mounting effect

KW - spurious modes

KW - weak boundary condition (WBC)

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

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