Keyphrases
Advanced Control
100%
Hard Materials
100%
Ploughing
100%
Ultrasonic Probe
100%
Ultra-hard Materials
37%
Tungsten
25%
Cantilever
25%
Piezoelectric Actuator
25%
Quartz Substrate
25%
Direct Patterning
25%
Adverse Effects
12%
Probe-based
12%
Control Method
12%
Soft Materials
12%
Process Control
12%
Actuator
12%
Nanoimprint Lithography
12%
Vibrational Dynamics
12%
Hysteresis
12%
Iterative Learning Control
12%
Precision Tracking
12%
Ultrasonic Vibration
12%
Assembly Pattern
12%
Dip-pen
12%
Size Patterns
12%
Fine Pattern
12%
Cross-axis Coupling
12%
Writing Speed
12%
Mechanical Fixture
12%
Actuation System
12%
Direct Pattern
12%
Process Capability
12%
Drift Effect
12%
Ploughing Speed
12%
Tungsten Coating
12%
Coating Substrate
12%
Physical Reactions
12%
Diamond Probe
12%
Engineering
Ultrasonics
100%
Hard Material
100%
Piezoelectric Actuator
33%
Soft Material
16%
Process Control
16%
Experimental Result
16%
Conductive
16%
Diamond
16%
Nanolithography
16%
Iterative Learning Control
16%
Line Width
16%
Actuation System
16%
Material Science
Actuator
100%
Tungsten
100%
Piezoelectricity
66%
Diamond
33%
Process Control
33%
Linewidth
33%