Abstract
Nonpolar a -plane (11 2- 0) Mgx Zn1-x O (a- Mgx Zn1-x O) films are deposited on (01 1- 2) r -sapphire substrates using metalorganic chemical vapor deposition with varying Mg composition (x from 0 to 0.25). Unit cell parameters with Mg composition are determined by high-resolution triple-axis x-ray diffraction. In-plane strain along the c -axis [0001] and m -axis [1 1- 00] in the films is anisotropic and increases with increasing Mg composition. The in-plane strain anisotropy changes with Mg composition in a- Mgx Zn1-x O. Calculations are carried out to determine the influence of Mg content on the residual interfacial strain.
Original language | English (US) |
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Article number | 151907 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 15 |
DOIs | |
State | Published - 2008 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)