Mg composition dependent strain analysis in nonpolar a-plane Mg xZn1-xO films

G. Saraf, Y. Lu, T. Siegrist

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Abstract

Nonpolar a -plane (11 2- 0) Mgx Zn1-x O (a- Mgx Zn1-x O) films are deposited on (01 1- 2) r -sapphire substrates using metalorganic chemical vapor deposition with varying Mg composition (x from 0 to 0.25). Unit cell parameters with Mg composition are determined by high-resolution triple-axis x-ray diffraction. In-plane strain along the c -axis [0001] and m -axis [1 1- 00] in the films is anisotropic and increases with increasing Mg composition. The in-plane strain anisotropy changes with Mg composition in a- Mgx Zn1-x O. Calculations are carried out to determine the influence of Mg content on the residual interfacial strain.

Original languageEnglish (US)
Article number151907
JournalApplied Physics Letters
Volume93
Issue number15
DOIs
StatePublished - 2008

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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