Micro-Laser Processing

Benxin Wu, Tugrul Ozel

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Scopus citations
Original languageEnglish (US)
Title of host publicationMicro-Manufacturing
Subtitle of host publicationDesign and Manufacturing of Micro-Products
PublisherJohn Wiley and Sons
Number of pages37
ISBN (Print)9780470556443
Publication statusPublished - Mar 14 2011

All Science Journal Classification (ASJC) codes

  • Materials Science(all)


  • Laser shock peening (LSP), called laser peening in literature - process to impart compressive residual stress into near-surface region of metallic workpieces
  • Micro-laser processing - laser-based material processing on a microscale, in thermal processing, shock peening and surface treatment
  • Nanosecond-pulsed laser ablation, two stages - material removal mechanisms, surface vaporization stage and hydrodynamic expansion stage

Cite this

Wu, B., & Ozel, T. (2011). Micro-Laser Processing. In Micro-Manufacturing: Design and Manufacturing of Micro-Products (pp. 159-195). John Wiley and Sons. https://doi.org/10.1002/9781118010570.ch6