MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.

G. K. Celler; L. E. Trimble

doi:10.1051/jphyscol:1982147

MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.

G. K. Celler, L. E. Trimble

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Journal de Physique (Paris), Colloque
Pages	353-362
Number of pages	10
Edition	10
DOIs	https://doi.org/10.1051/jphyscol:1982147
State	Published - 1982
Externally published	Yes

Publication series

Name	Journal de Physique (Paris), Colloque
Number	10
Volume	43
ISSN (Print)	0449-1947

All Science Journal Classification (ASJC) codes

General Engineering

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10.1051/jphyscol:1982147

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title = "MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.",

author = "Celler, {G. K.} and Trimble, {L. E.}",

year = "1982",

doi = "10.1051/jphyscol:1982147",

language = "English (US)",

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series = "Journal de Physique (Paris), Colloque",

number = "10",

pages = "353--362",

booktitle = "Journal de Physique (Paris), Colloque",

edition = "10",

}

TY - GEN

T1 - MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.

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AU - Trimble, L. E.

PY - 1982

Y1 - 1982

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U2 - 10.1051/jphyscol:1982147

DO - 10.1051/jphyscol:1982147

M3 - Conference contribution

AN - SCOPUS:0020191673

SN - 2902731515

SN - 9782902731510

T3 - Journal de Physique (Paris), Colloque

SP - 353

EP - 362

BT - Journal de Physique (Paris), Colloque

ER -

MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.

Publication series

All Science Journal Classification (ASJC) codes

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