MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT.

G. K. Celler, L. E. Trimble

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationJournal de Physique (Paris), Colloque
Pages353-362
Number of pages10
Edition10
DOIs
StatePublished - Jan 1 1982
Externally publishedYes

Publication series

NameJournal de Physique (Paris), Colloque
Number10
Volume43
ISSN (Print)0449-1947

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Celler, G. K., & Trimble, L. E. (1982). MICROELECTRONICS APPLICATIONS ON DEPOSITED Si FILMS RECRYSTALLIZED FROM THE MELT. In Journal de Physique (Paris), Colloque (10 ed., pp. 353-362). (Journal de Physique (Paris), Colloque; Vol. 43, No. 10). https://doi.org/10.1051/jphyscol:1982147