Miniaturized VHF quartz MEMs resonator design methodology

D. J. Kirby, R. L. Kubena, Y. K. Yong, F. P. Stratton, H. D. Nguyen, R. J. Joyce, D. T. Chang, J. F. Garstecki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The miniaturization of resonators for timing applications brings with it new challenges in terms of device optimization. As the device size is reduced, design intolerances lead to more significant differences between modeled and fabricated devices leading to poor performance. In this paper we present a methodology for improving resonator designs. A 32MHz AT-cut quartz thick VHF shear mode resonator is optimized for high Q and high thermal stability for integration on CMOS electronics. Uncompensated measured data agrees to within a few ppm of Comsol 3-d FEA simulations.

Original languageEnglish (US)
Title of host publication2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages198-202
Number of pages5
ISBN (Electronic)9781538629161
DOIs
StatePublished - Oct 27 2017
Event2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France
Duration: Jul 9 2017Jul 13 2017

Publication series

Name2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings

Other

Other2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
Country/TerritoryFrance
CityBesancon
Period7/9/177/13/17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Keywords

  • AT-cut resonators
  • CMOS integration
  • Quartz MEMS
  • frequency stability
  • oscillators
  • stress isolation

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