Modeling the Effects of Surface States on DLTS Spectra of GaAs MESFET’s

Research output: Contribution to journalArticle

28 Scopus citations


A resistance DLTS model is presented which explains the effects of surface states on DLTS spectra of GaAs MESFET’s. The model includes both deep traps in the active channel under the gated region and the surface states on the ungated surface between the contacts of gate and source as well as gate and drain. Surface states are shown to result in minority hole-like DLTS signals. The model reveals that the surface state energy levels can be reliably determined from these hole-like DLTS signals, although the concentrations cannot be accurately profiled due to the strong dependence of the peak magnitude of the hole-like signals on the ungated surface conditions, in particular, the surface leakage current. The peak magnitude of the hole-like signals are shown to depend strongly on the filling pulsewidth tp used in a DLTS measurement. It is also shown that the peak magnitude decreases rapidly as the ratio of the gate length to the gate-source spacing is increased. It is expected that the model can be a useful tool for investigating the passivation effects of the ungated surface on a short-gate GaAs MESFET.

Original languageEnglish (US)
Pages (from-to)1235-1244
Number of pages10
JournalIEEE Transactions on Electron Devices
Issue number5
Publication statusPublished - May 1990


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this