@inbook{9ac67365845e40489f35302392c21e11,
title = "Nanofabrication Techniques",
keywords = "Nanoelectromechanical systems, Nanosphere lithography, Positive and negative photoresist materials",
author = "Freeman, {Joseph W.} and Wright, {Lee D.} and Laurencin, {Cato T.} and Subhabrata Bhattacharyya",
year = "2007",
month = apr,
day = "11",
doi = "10.1002/9780470185834.ch1",
language = "English (US)",
isbn = "9780471925521",
pages = "1--24",
booktitle = "Biomedical Nanostructures",
publisher = "John Wiley and Sons",
}