Nanoindentation of epitaxial films: a study of pop-in events

Adrian Mann, J. B. Pethica, W. D. Nix, S. Tomiya

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations


Discontinuities in nanoindentation loading curves are frequently observed in ceramic materials. These normally occur at fairly random loads and displacements, probably due to the random distance of pre-existing defects from the indent location. Here we report the observation of reproducible, sudden indent-depth changes which occur over a very narrow distribution of depths and loads, for GaAs and a range of related epitaxial layer systems. The surface preparation and material defect density have a significant influence. Different tip geometries have been used to gain insights into the deformation processes which cause these discontinuities.

Original languageEnglish (US)
Pages (from-to)271-276
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - Jan 1 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 28 1994Nov 30 1994

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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