Lithography ('stone writing') is used to describe the general writing and printing processes by which desired patterns are created in or transferred to solid substrates. In recent years lithography techniques have been developed for use in the nanometer domain. The nanometer domain covers sizes bigger than several atoms but smaller than the wavelength of visible light. Nature abounds in structures in this domain, ranging from microcrystallites to macromolecules to viruses. This review considers structures in which more than one critical dimension is small. Nanometer fabrication techniques and their limits are surveyed along with applications to which nanofabrication seems particularly appropriate.
|Original language||English (US)|
|Title of host publication||Annual Review of Materials Science|
|Publisher||Annual Reviews Inc.|
|Number of pages||26|
|State||Published - 1986|
All Science Journal Classification (ASJC) codes
- Materials Science(all)