Narrow YBCO microbridges in ultrathin laser deposited films

M. Danerud; M. E. Gershenson; Z. Ivanov; D. Winkler; T. Claeson

doi:10.1016/0921-4534(91)91094-K

Narrow YBCO microbridges in ultrathin laser deposited films

M. Danerud, M. E. Gershenson, Z. Ivanov, D. Winkler, T. Claeson

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO₃ was covered by 200 Å of ZrO₂. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO₂ etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed T_c above 90 K and j_c above 10⁶ A/cm² at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.

Original language	English (US)
Pages (from-to)	1939-1940
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	185-189
Issue number	PART 3
DOIs	https://doi.org/10.1016/0921-4534(91)91094-K
State	Published - Dec 1 1991
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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title = "Narrow YBCO microbridges in ultrathin laser deposited films",

abstract = "A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 {\AA} thick YBCO film on LaAlO3 was covered by 200 {\AA} of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 {\AA} ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.",

author = "M. Danerud and Gershenson, {M. E.} and Z. Ivanov and D. Winkler and T. Claeson",

year = "1991",

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doi = "10.1016/0921-4534(91)91094-K",

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T1 - Narrow YBCO microbridges in ultrathin laser deposited films

AU - Danerud, M.

AU - Gershenson, M. E.

AU - Ivanov, Z.

AU - Winkler, D.

AU - Claeson, T.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO3 was covered by 200 Å of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.

AB - A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO3 was covered by 200 Å of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.

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DO - 10.1016/0921-4534(91)91094-K

M3 - Article

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VL - 185-189

SP - 1939

EP - 1940

JO - Physica C: Superconductivity and its Applications

JF - Physica C: Superconductivity and its Applications

SN - 0921-4534

IS - PART 3

ER -

Narrow YBCO microbridges in ultrathin laser deposited films

Abstract

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