Abstract
A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO3 was covered by 200 Å of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.
Original language | English (US) |
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Pages (from-to) | 1939-1940 |
Number of pages | 2 |
Journal | Physica C: Superconductivity and its applications |
Volume | 185-189 |
Issue number | PART 3 |
DOIs | |
State | Published - Dec 1 1991 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering