A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO3 was covered by 200 Å of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering