Narrow YBCO microbridges in ultrathin laser deposited films

M. Danerud, M. E. Gershenson, Z. Ivanov, D. Winkler, T. Claeson

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A new processing method for fabrication of narrow YBCO microbridges in ultrathin laser deposited films was developed. A 600 Å thick YBCO film on LaAlO3 was covered by 200 Å of ZrO2. A lift-off stencil made by electron beam lithography was produced and covered by a 500 Å ZrO2 etch mask. The microbridges (down to 0.4 μm wide) were produced by ion milling. The 1μm wide microbridge showed Tc above 90 K and jc above 106 A/cm2 at 77 K. This structure on a substrate with low dielectric loss is needed for ultrafast devices utilizing the electron heating effect.

Original languageEnglish (US)
Pages (from-to)1939-1940
Number of pages2
JournalPhysica C: Superconductivity and its applications
Volume185-189
Issue numberPART 3
DOIs
StatePublished - Dec 1 1991
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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