@inproceedings{8d2acf8df0c241809327d25a63426786,
title = "Novel FEM Models of Intermodulation Effects in BAW and SAW Devices",
abstract = "The nonlinear intermodulation effect in piezoelectric devices was studied By using the three-dimensional equations of nonlinear piezoelectricity and the method of harmonic balance, we have formulated and derived coupled sets of nonlinear piezoelectric equations in the frequency domain for intermodulation effects. The coupled sets of equations could be embedded in COMSOL FEM models. In order to check the validity and accuracy of the FEM models we studied the third order intermodulation effects in AT-cut quartz resonators. Our three-dimensional FEM model results compared well with the analytical one-dimensional results by Tiersten and with the experimental results by Smythe. The FEM models could be used for simulating intermodulation effects in BAW and SAW piezoelectric devices provided that the nonlinear material constants are available and are accurate.",
keywords = "Intermodulation distortion effect, bulk acoustic waves (BAW), finite element method (FEM), nonlinear acoustoelectric behaviors, quartz resonators, surface acoustic waves (SAW)",
author = "Xiangnan Pang and Yong, {Yook Kong}",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",
year = "2019",
month = oct,
doi = "10.1109/ULTSYM.2019.8926068",
language = "English (US)",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
pages = "177--180",
booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",
address = "United States",
}