On the optimality of one-unit cycle scheduling of multi-cluster tools with single-blade robots

Wai Kin Chan, Jingang Yi, Shengwei Ding

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Scopus citations

Abstract

In semiconductor manufacturing, finding an efficient way for scheduling a multi-cluster tool is crucial for productivity improvement and cost reduction. In this paper, we analyze optimal scheduling of multi-cluster tools under a general configuration with non-zero constant transfer robot traveling time. A resource-based method is developed to analyze optimal scheduling of single-cluster tools. Optimality conditions for obtaining minimum one-unit cycle time for multi-cluster tools are established. Under these conditions, it is shown that the optimal one-unit cycle can be achieved by first optimally scheduling each single-cluster tool separately and then combining the schedules to form the optimal schedule for the multi-cluster tool. A polynomial-time algorithm is presented to find the optimal one-unit cycle time and its corresponding schedules for a multi-cluster tool.

Original languageEnglish (US)
Title of host publicationProceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
Pages392-397
Number of pages6
DOIs
StatePublished - 2007
Externally publishedYes
Event3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007 - Scottsdale, AZ, United States
Duration: Sep 22 2007Sep 25 2007

Publication series

NameProceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Other

Other3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
CountryUnited States
CityScottsdale, AZ
Period9/22/079/25/07

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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