TY - GEN
T1 - On the optimality of one-unit cycle scheduling of multi-cluster tools with single-blade robots
AU - Chan, Wai Kin
AU - Yi, Jingang
AU - Ding, Shengwei
PY - 2007
Y1 - 2007
N2 - In semiconductor manufacturing, finding an efficient way for scheduling a multi-cluster tool is crucial for productivity improvement and cost reduction. In this paper, we analyze optimal scheduling of multi-cluster tools under a general configuration with non-zero constant transfer robot traveling time. A resource-based method is developed to analyze optimal scheduling of single-cluster tools. Optimality conditions for obtaining minimum one-unit cycle time for multi-cluster tools are established. Under these conditions, it is shown that the optimal one-unit cycle can be achieved by first optimally scheduling each single-cluster tool separately and then combining the schedules to form the optimal schedule for the multi-cluster tool. A polynomial-time algorithm is presented to find the optimal one-unit cycle time and its corresponding schedules for a multi-cluster tool.
AB - In semiconductor manufacturing, finding an efficient way for scheduling a multi-cluster tool is crucial for productivity improvement and cost reduction. In this paper, we analyze optimal scheduling of multi-cluster tools under a general configuration with non-zero constant transfer robot traveling time. A resource-based method is developed to analyze optimal scheduling of single-cluster tools. Optimality conditions for obtaining minimum one-unit cycle time for multi-cluster tools are established. Under these conditions, it is shown that the optimal one-unit cycle can be achieved by first optimally scheduling each single-cluster tool separately and then combining the schedules to form the optimal schedule for the multi-cluster tool. A polynomial-time algorithm is presented to find the optimal one-unit cycle time and its corresponding schedules for a multi-cluster tool.
UR - http://www.scopus.com/inward/record.url?scp=44449131528&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=44449131528&partnerID=8YFLogxK
U2 - 10.1109/COASE.2007.4341844
DO - 10.1109/COASE.2007.4341844
M3 - Conference contribution
AN - SCOPUS:44449131528
SN - 1424411548
SN - 9781424411542
T3 - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
SP - 392
EP - 397
BT - Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
T2 - 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007
Y2 - 22 September 2007 through 25 September 2007
ER -