Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations

Wai Kin Victor Chan, Shengwei Ding, Jingang Yi, Dezhen Song

Research output: Contribution to journalArticle

66 Citations (Scopus)

Abstract

In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade robots and constant robot moving times. We present a recursive minimal cycle time algorithm to reveal a multi-unit resource cycle for multicluster tools under a given robot schedule. For a serial-cluster tool, we provide a closed-form formulation for the minimal cycle time. The formulation explicitly provides the interaction relationship among clusters. We further present decomposition conditions under which the optimal scheduling of multicluster becomes much easier and straightforward. Optimality conditions for the widely used robot pull schedule are also provided. An example from industry production is used to illustrate the analytical results. The decomposition and optimality conditions for the robot pull schedule are also illustrated by Monte Carlo simulation for the industrial example.

Original languageEnglish (US)
Article number5454420
Pages (from-to)17-28
Number of pages12
JournalIEEE Transactions on Automation Science and Engineering
Volume8
Issue number1
DOIs
StatePublished - Jan 1 2011

Fingerprint

Scheduling
Topology
Robots
Decomposition
Industry

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Cluster tools
  • multiple machines
  • performance/ productivity
  • scheduling
  • semiconductor manufacturing

Cite this

@article{6ff509df9bd54cf58569a9649b399d5a,
title = "Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations",
abstract = "In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade robots and constant robot moving times. We present a recursive minimal cycle time algorithm to reveal a multi-unit resource cycle for multicluster tools under a given robot schedule. For a serial-cluster tool, we provide a closed-form formulation for the minimal cycle time. The formulation explicitly provides the interaction relationship among clusters. We further present decomposition conditions under which the optimal scheduling of multicluster becomes much easier and straightforward. Optimality conditions for the widely used robot pull schedule are also provided. An example from industry production is used to illustrate the analytical results. The decomposition and optimality conditions for the robot pull schedule are also illustrated by Monte Carlo simulation for the industrial example.",
keywords = "Cluster tools, multiple machines, performance/ productivity, scheduling, semiconductor manufacturing",
author = "Chan, {Wai Kin Victor} and Shengwei Ding and Jingang Yi and Dezhen Song",
year = "2011",
month = "1",
day = "1",
doi = "10.1109/TASE.2010.2046893",
language = "English (US)",
volume = "8",
pages = "17--28",
journal = "IEEE Transactions on Automation Science and Engineering",
issn = "1545-5955",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "1",

}

Optimal scheduling of multicluster tools with constant robot moving times, part II : Tree-like topology configurations. / Chan, Wai Kin Victor; Ding, Shengwei; Yi, Jingang; Song, Dezhen.

In: IEEE Transactions on Automation Science and Engineering, Vol. 8, No. 1, 5454420, 01.01.2011, p. 17-28.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Optimal scheduling of multicluster tools with constant robot moving times, part II

T2 - Tree-like topology configurations

AU - Chan, Wai Kin Victor

AU - Ding, Shengwei

AU - Yi, Jingang

AU - Song, Dezhen

PY - 2011/1/1

Y1 - 2011/1/1

N2 - In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade robots and constant robot moving times. We present a recursive minimal cycle time algorithm to reveal a multi-unit resource cycle for multicluster tools under a given robot schedule. For a serial-cluster tool, we provide a closed-form formulation for the minimal cycle time. The formulation explicitly provides the interaction relationship among clusters. We further present decomposition conditions under which the optimal scheduling of multicluster becomes much easier and straightforward. Optimality conditions for the widely used robot pull schedule are also provided. An example from industry production is used to illustrate the analytical results. The decomposition and optimality conditions for the robot pull schedule are also illustrated by Monte Carlo simulation for the industrial example.

AB - In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade robots and constant robot moving times. We present a recursive minimal cycle time algorithm to reveal a multi-unit resource cycle for multicluster tools under a given robot schedule. For a serial-cluster tool, we provide a closed-form formulation for the minimal cycle time. The formulation explicitly provides the interaction relationship among clusters. We further present decomposition conditions under which the optimal scheduling of multicluster becomes much easier and straightforward. Optimality conditions for the widely used robot pull schedule are also provided. An example from industry production is used to illustrate the analytical results. The decomposition and optimality conditions for the robot pull schedule are also illustrated by Monte Carlo simulation for the industrial example.

KW - Cluster tools

KW - multiple machines

KW - performance/ productivity

KW - scheduling

KW - semiconductor manufacturing

UR - http://www.scopus.com/inward/record.url?scp=78651094962&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78651094962&partnerID=8YFLogxK

U2 - 10.1109/TASE.2010.2046893

DO - 10.1109/TASE.2010.2046893

M3 - Article

AN - SCOPUS:78651094962

VL - 8

SP - 17

EP - 28

JO - IEEE Transactions on Automation Science and Engineering

JF - IEEE Transactions on Automation Science and Engineering

SN - 1545-5955

IS - 1

M1 - 5454420

ER -