Optimizing UHF quartz MEMs resonators for high thermal stability

D. J. Kirby, Y. K. Yong, R. L. Kubena, R. Perahia, D. T. Chang, H. Nguyen, F. P. Stratton, R. J. Joyce, H. P. Moyer, R. G. Nagele, P. D. Brewer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

A 1 GHz AT-cut quartz thickness shear mode resonator is modeled for the first time with thermally induced bonding stresses and their effect on the device frequency-temperature (f-T) characteristic. Without the details of the bonding configuration, modeling indicates the f-T characteristic slightly rotates as a function of the change in stiffness of a simplified absorbing mount. However, if details of the bonding configuration are included, our modeling predicts the potential for a significant distortion in the f-T curve. High or varying stress over temperature in the device active region is found to lead to an undesirable increase in the f-T slope. The origin of the active region stress can be varied, but in practice it frequently originates from a temperature dependent bonding stress, or from fabrication steps such as metal depositions. In this paper we highlight the magnitude of the thermal stress effect on the f-T curve, and offer design methods that mitigate the thermally induced bonding stress by de-coupling the active resonator area from high stress regions of the quartz device.

Original languageEnglish (US)
Title of host publication2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Pages699-702
Number of pages4
DOIs
StatePublished - 2013
Event2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 - Prague, Czech Republic
Duration: Jul 21 2013Jul 25 2013

Publication series

Name2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Other

Other2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Country/TerritoryCzech Republic
CityPrague
Period7/21/137/25/13

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Keywords

  • Quartz MEMS
  • frequency stability
  • oscillators
  • resonators
  • stress
  • thickness shear mode

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