Organic microelectromechanical relays for ultralow-power flexible transparent large-area electronics

Yanbiao Pan, Nabeela Khan, Ming Lu, Jaeseok Jeon

Research output: Contribution to journalArticle

7 Scopus citations


This paper presents the development of electrostatically actuated polymer-based microelectromechanical relays as a potential replacement for organic field-effect thin-film transistors in order to enable near-zero-power flexible transparent large-area electronics. A low-temperature five-mask surfacemicromachining process is developed to fabricate two types of prototype relays: purely polymeric and partially polymeric (inorganic-organic hybrid) relays. Experimental results demonstrate the operation of the prototypes as a switch, showing immeasurably low OFF-state leakage current (∼10 fA), abrupt switching behavior and high ON/OFF-current ratio (>105 over an effective input voltage swing of ≤100 mV), small hysteresis voltages (≤100 mV), and low contact adhesive forces (<10 nN/μm2). The influence of temperature on switching characteristics, including hysteresis voltages, is investigated as well.

Original languageEnglish (US)
Article number7365436
Pages (from-to)832-840
Number of pages9
JournalIEEE Transactions on Electron Devices
Issue number2
StatePublished - Feb 1 2016

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


  • Microelectromechanical (MEM) relays
  • Organic FET (OFET)
  • Organic thin-film transistor
  • Polymer
  • Relay

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