This paper presents the development of electrostatically actuated polymer-based microelectromechanical relays as a potential replacement for organic field-effect thin-film transistors in order to enable near-zero-power flexible transparent large-area electronics. A low-temperature five-mask surfacemicromachining process is developed to fabricate two types of prototype relays: purely polymeric and partially polymeric (inorganic-organic hybrid) relays. Experimental results demonstrate the operation of the prototypes as a switch, showing immeasurably low OFF-state leakage current (∼10 fA), abrupt switching behavior and high ON/OFF-current ratio (>105 over an effective input voltage swing of ≤100 mV), small hysteresis voltages (≤100 mV), and low contact adhesive forces (<10 nN/μm2). The influence of temperature on switching characteristics, including hysteresis voltages, is investigated as well.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Microelectromechanical (MEM) relays
- Organic FET (OFET)
- Organic thin-film transistor