Performance evaluation and schedule optimization of multi-cluster tools with process times uncertainty

Shengwei Ding, Jingang Yi, Mike Tao Zhang, Raha Akhavan-Tabatabaei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Performance evaluation and schedule optimization of cluster tools is challenging, especially when the process times with uncertainty. In this paper, the Critical Path Method (CPM) is used to analyze the throughput of multi-cluster tools with fixed action sequence. Slacks of non-critical path actions are studied and integrated to find the average cycle time of the cluster tool. A thin film tool from Novellus is used as an example to explain this methodology.

Original languageEnglish (US)
Title of host publication2006 IEEE International Conference on Automation Science and Engineering, CASE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages112-117
Number of pages6
ISBN (Print)1424403103, 9781424403103
DOIs
StatePublished - Jan 1 2006
Event2006 IEEE International Conference on Automation Science and Engineering, CASE - Shanghai, China
Duration: Oct 8 2006Oct 10 2006

Publication series

Name2006 IEEE International Conference on Automation Science and Engineering, CASE

Other

Other2006 IEEE International Conference on Automation Science and Engineering, CASE
Country/TerritoryChina
CityShanghai
Period10/8/0610/10/06

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Cluster tool
  • Critical Path Method (CPM)
  • Cycle time (CT)
  • Event graph
  • Network model

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