Piezoelectric, laminated composite plate theory for thin-film resonators

Y. K. Yong, J. T. Stewart, A. Ballato

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

A piezoelectric, laminated composite plate theory is developed and presented for the purpose of modeling and analyzing piezoelectric thin-film resonators and filters. The laminated plate equations are extensions of anisotropic composite plate theories by Yang, Norris and Stavsky[1], and Whitney and Pagano[2] to include piezoelectric effects and capabilities for modeling harmonic overtones of thickness-shear vibrations. Two-dimensional equations of motion of piezoelectric laminates were deduced from the three-dimensional equations of linear piezoelectricity by expanding mechanical displacement u1 and electric potential φ in a series of trigonometric functions as proposed by Lee and Nikodem[3] for elastic, isotropic plates and later extended to piezoelectric crystal plates by Syngellakis and Lee[4], and Lee, Syngellakis and Hou[5]. The laminated plate equations are applied to a zinc oxide-silicon bilayer strip without electrodes and solved for straight crested waves. Dispersion relations and mode shapes of the fundamental thickness-shear are presented for different ratios of zinc-oxide to silicon thickness.

Original languageEnglish (US)
Article number234218
Pages (from-to)517-522
Number of pages6
JournalProceedings - IEEE Ultrasonics Symposium
DOIs
StatePublished - 1991
Externally publishedYes
Event1991 IEEE Ultrasonics Symposium. ULTSYM 1991 - Orlando, United States
Duration: Dec 8 1991Dec 11 1991

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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