Abstract
Si MOSFET structures, with channel widths of 20 and 0.5 μm, are used to look for the transition from two-dimensional to one-dimensional behavior in inversion layers. In the wide channels, we find a transition from non-metallic to metallic behavior as the electron concentration in the layer is increased. In the narrow channels, non-metallic behavior is observed regardless of electron concentration.
Original language | English (US) |
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Pages (from-to) | 2105-2107 |
Number of pages | 3 |
Journal | Physica B+C |
Volume | 109-110 |
Issue number | C |
DOIs | |
State | Published - Jul 1982 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Engineering(all)