Preparation in situ and properties of thin films HTSC YBa2Cu3O x

M. I. Faley, M. E. Gershenson

Research output: Contribution to journalArticlepeer-review


We describe the technique of in situ preparation of thin (d=0, 1-1 μm) YBCO films by the RF magnetron sputtering of the ceramic target in the argon-oxygen atmosphere on the heated substrates, and report the preliminary results of investigation of the multilayer structure based on such films.

Original languageEnglish (US)
Pages (from-to)473-477
Number of pages5
JournalBulletin of Materials Science
Issue number2
StatePublished - Apr 1991

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials


  • High temperature superconductivity
  • RF sputtering
  • films

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