We describe the technique of in situ preparation of thin (d=0, 1-1 μm) YBCO films by the RF magnetron sputtering of the ceramic target in the argon-oxygen atmosphere on the heated substrates, and report the preliminary results of investigation of the multilayer structure based on such films.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- High temperature superconductivity
- RF sputtering