TY - JOUR
T1 - Properties of epitaxial ZnO thin films for GaN and related applications
AU - Shen, H.
AU - Wraback, M.
AU - Pamulapati, J.
AU - Liang, S.
AU - Gorla, C.
AU - Lu, Y.
PY - 1999
Y1 - 1999
N2 - In this paper, we present a detailed study of high quality (110) ZnO films, epitaxially grown on R-plane sapphire substrates by metal-organic chemical vapor deposition (MOCVD). The epitaxial relationships are (1 1 2̄ 0) ZnO//(0 1 1̄ 2) Al2O3 and [0 0 0 1] ZnO//[0 1̄ 1 1] Al2O3 as confirmed by X-ray diffraction (θ-2θ, and φ-scan) and high-resolution cross-sectional transmission electron microscopy (HR-TEM). Low temperature photoluminescence (PL) indicates the ZnO thin films are almost strain free. Optical absorption and reflection measurements with linearly polarized light indicate a strong optical anisotropy. The polarization rotation towards the C-axis associated with the optical anisotropy is utilized to demonstrate an optically addressed ultra-fast, ultraviolet light modulator.
AB - In this paper, we present a detailed study of high quality (110) ZnO films, epitaxially grown on R-plane sapphire substrates by metal-organic chemical vapor deposition (MOCVD). The epitaxial relationships are (1 1 2̄ 0) ZnO//(0 1 1̄ 2) Al2O3 and [0 0 0 1] ZnO//[0 1̄ 1 1] Al2O3 as confirmed by X-ray diffraction (θ-2θ, and φ-scan) and high-resolution cross-sectional transmission electron microscopy (HR-TEM). Low temperature photoluminescence (PL) indicates the ZnO thin films are almost strain free. Optical absorption and reflection measurements with linearly polarized light indicate a strong optical anisotropy. The polarization rotation towards the C-axis associated with the optical anisotropy is utilized to demonstrate an optically addressed ultra-fast, ultraviolet light modulator.
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U2 - 10.1557/s1092578300002696
DO - 10.1557/s1092578300002696
M3 - Article
AN - SCOPUS:3442890683
SN - 1092-5783
VL - 4
SP - 5d
JO - MRS Internet Journal of Nitride Semiconductor Research
JF - MRS Internet Journal of Nitride Semiconductor Research
IS - SUPPL. 1
ER -