Prospects for high-resolution electron energy-loss experiments with the scanning transmission electron microscope

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Abstract

A brief description of a Wien filter energy-loss spectrometer design for the STEM is given. The performance limit of the device is about 80 meV resolution at 1 mrad semi-angle. At a 12.5 mrad semi-angle referred to the specimen, the total system delivers 0.35 eV resolution, limited mainly by the field emission tunneling width. Various experimental results are compared to results from other spectrometers.

Original languageEnglish (US)
Pages (from-to)125-129
Number of pages5
JournalUltramicroscopy
Volume18
Issue number1-4
DOIs
StatePublished - 1985
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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