RAPID LARGE AREA ANNEALING OF ION-IMPLANTED Si WITH INCOHERENT LIGHT.

D. J. Lischner, G. K. Celler

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Pages	759-764
Number of pages	6
State	Published - 1982
Externally published	Yes

Name	Materials Research Society Symposia Proceedings
Volume	4
ISSN (Print)	0272-9172

All Science Journal Classification (ASJC) codes

@inproceedings{d382d8102d9744ec8bc2d9150b49d152,

title = "RAPID LARGE AREA ANNEALING OF ION-IMPLANTED Si WITH INCOHERENT LIGHT.",

author = "Lischner, {D. J.} and Celler, {G. K.}",

year = "1982",

language = "English (US)",

isbn = "0444006931",

series = "Materials Research Society Symposia Proceedings",

pages = "759--764",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - RAPID LARGE AREA ANNEALING OF ION-IMPLANTED Si WITH INCOHERENT LIGHT.

AU - Lischner, D. J.

AU - Celler, G. K.

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020256595&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020256595&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0020256595

SN - 0444006931

T3 - Materials Research Society Symposia Proceedings

SP - 759

EP - 764

BT - Materials Research Society Symposia Proceedings

ER -