Reproducible technique for fabrication of thin films of high transition temperature superconductors

P. M. Mankiewich, J. H. Scofield, W. J. Skocpol, R. E. Howard, A. H. Dayem, E. Good

Research output: Contribution to journalArticlepeer-review

302 Scopus citations

Abstract

We report on a new process to make films of Y1Ba 2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (106 A/cm2 at 81 K), and a reduced sensitivity to fabrication and environmental conditions. Because of the lower reactivity of the films, we have been able to pattern them in both the pre-annealed and post-annealed states using conventional positive photoresist technology.

Original languageEnglish (US)
Pages (from-to)1753-1755
Number of pages3
JournalApplied Physics Letters
Volume51
Issue number21
DOIs
StatePublished - 1987
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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