Review of production of microfluidic devices: Material, manufacturing and metrology

Shiguang Li, Zhiguang Xu, Aaron Mazzeo, Daniel J. Burns, Gang Fu, Matthew Dirckx, Vijay Shilpiekandula, Xing Chen, Nimai C. Nayak, Eehern Wong, Soon Fatt Yoon, Zhong Ping Fang, Kamal Youeef-Toumi, David Hardt, Shu Beng Tor, Chee Yoon Yue, Jung Hoon Chun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Scopus citations


Microfluidic devices play a crucial role in biology, life sciences and many other fields. Three aspects have to be considered in production of microfluidic devices: (i) material properties before and after processing, (ii) tooling and processing methodologies, and (iii) measurements for process control. This paper presents a review of these three areas. The key properties of materials are reviewed from both the production and device performance point of views in this paper. The tooling and processing methodologies considered include both the direct tooling methods and the mold based processing methods. The response of material on the production parameters during hot embossing process are simulated for process control and product quality prediction purpose. Finally, the measurements for process control aspect discuss different measurement approaches, especially the defect inspection, critical dimensional measurements, bonding quality characterization and checking functionality. Simulation and experimental results are used throughout the paper to illustrate the effectiveness of such approaches.

Original languageEnglish (US)
Title of host publicationMEMS, MOEMS, and Micromachining III
StatePublished - 2008
Externally publishedYes
EventMEMS, MOEMS, and Micromachining III - Strasbourg, France
Duration: Apr 9 2008Apr 10 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMEMS, MOEMS, and Micromachining III

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Bio-MEMS
  • Lab-on-a-chip
  • Material
  • Measurement
  • Microfluid
  • Tooling and processing


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