RF properties of LTCC BST thick film made by MicroPen

T. Hu; V. K. Palukuru; H. Jantunen; C. S. Hsi; A. Safari

doi:10.1080/00150190902963682

RF properties of LTCC BST thick film made by MicroPen

T. Hu, V. K. Palukuru, H. Jantunen, C. S. Hsi, A. Safari

Inst Adv Material Dev&Nanotech

Research output: Contribution to journal › Conference article › peer-review

Abstract

The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The εr and tanδ of the LTCC BST thick film were 57.5-41 and 0.013-0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.

Original language	English (US)
Pages (from-to)	17-22
Number of pages	6
Journal	Ferroelectrics
Volume	388
Issue number	1 PART 2
DOIs	https://doi.org/10.1080/00150190902963682
State	Published - 2009
Event	5th International Conference on Microwave Materials and their Applications, MMA-2008 - Hangzhou, China Duration: Nov 4 2008 → Nov 8 2008

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Keywords

BaSrTiO
Dielectric properties
Direct-writing
Films
Microstructure

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title = "RF properties of LTCC BST thick film made by MicroPen",

abstract = "The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The εr and tanδ of the LTCC BST thick film were 57.5-41 and 0.013-0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.",

keywords = "BaSrTiO, Dielectric properties, Direct-writing, Films, Microstructure",

author = "T. Hu and Palukuru, {V. K.} and H. Jantunen and Hsi, {C. S.} and A. Safari",

note = "Funding Information: The work was supported by the project CoNaPo (No. 40135/05, 40116/06) and Nokia Visiting Researcher Scholarship. The authors acknowledge all the financing partners of the CoNaPo project including Premix Oy, Perlos Oyj, Pulse Finland Oy, NOF Co. and the Finnish Funding Agency for Technology and Innovation (Tekes).; 5th International Conference on Microwave Materials and their Applications, MMA-2008 ; Conference date: 04-11-2008 Through 08-11-2008",

year = "2009",

doi = "10.1080/00150190902963682",

language = "English (US)",

volume = "388",

pages = "17--22",

journal = "Ferroelectrics",

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publisher = "Taylor and Francis Ltd.",

number = "1 PART 2",

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TY - JOUR

T1 - RF properties of LTCC BST thick film made by MicroPen

AU - Hu, T.

AU - Palukuru, V. K.

AU - Jantunen, H.

AU - Hsi, C. S.

AU - Safari, A.

N1 - Funding Information: The work was supported by the project CoNaPo (No. 40135/05, 40116/06) and Nokia Visiting Researcher Scholarship. The authors acknowledge all the financing partners of the CoNaPo project including Premix Oy, Perlos Oyj, Pulse Finland Oy, NOF Co. and the Finnish Funding Agency for Technology and Innovation (Tekes).

PY - 2009

Y1 - 2009

N2 - The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The εr and tanδ of the LTCC BST thick film were 57.5-41 and 0.013-0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.

AB - The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The εr and tanδ of the LTCC BST thick film were 57.5-41 and 0.013-0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.

KW - BaSrTiO

KW - Dielectric properties

KW - Direct-writing

KW - Films

KW - Microstructure

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U2 - 10.1080/00150190902963682

DO - 10.1080/00150190902963682

M3 - Conference article

AN - SCOPUS:77949420687

VL - 388

SP - 17

EP - 22

JO - Ferroelectrics

JF - Ferroelectrics

SN - 0015-0193

IS - 1 PART 2

T2 - 5th International Conference on Microwave Materials and their Applications, MMA-2008

Y2 - 4 November 2008 through 8 November 2008

ER -

RF properties of LTCC BST thick film made by MicroPen

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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