RF properties of LTCC BST thick film made by MicroPen

T. Hu, V. K. Palukuru, H. Jantunen, C. S. Hsi, A. Safari

Research output: Contribution to journalConference articlepeer-review

Abstract

The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The εr and tanδ of the LTCC BST thick film were 57.5-41 and 0.013-0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.

Original languageEnglish (US)
Pages (from-to)17-22
Number of pages6
JournalFerroelectrics
Volume388
Issue number1 PART 2
DOIs
StatePublished - 2009
Event5th International Conference on Microwave Materials and their Applications, MMA-2008 - Hangzhou, China
Duration: Nov 4 2008Nov 8 2008

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Keywords

  • BaSrTiO
  • Dielectric properties
  • Direct-writing
  • Films
  • Microstructure

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