Si MEMS microbearing with integrated safety sensors for surgical applications

I. Horváth, P. Panayotatos, Yicheng Lu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


A silicon micromachined bearing was designed and fabricated consisting of a pair of self-aligning v-grooves. The two Si v-grooves were bonded together to form the three-dimensional structure through solder bumps of 75 μm diameter that provide alignment with a crucial vertical displacement tolerance. The microbearing includes integrated diode temperature sensors that serve to monitor a safe operating range under load. Current versus temperature curves and finite element analysis simulate the range of diode sensitivity. This three-dimensional structure, fabricated by silicon technology, demonstrates that a four to ten fold reduction in surgical cutting tool size can be achieved by utilizing the micromachined silicon microbearing in a micro-electromechanical system (MEMS) device. A prototype microtool has been bench tested and compared with realistic operating conditions. Based on this comparison, the microbearing holds promise for application in microsurgical cutting tools or as a MEMS cutting tool for surgical applications.

Original languageEnglish (US)
Pages (from-to)1-9
Number of pages9
JournalMicroelectronics Journal
Issue number1
StatePublished - Jan 2001

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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