Silanone (formula presented) on Si(100): Intermediate for initial silicon oxidation

Y. J. Chabal, Krishnan Raghavachari, X. Zhang, E. Garfunkel

Research output: Contribution to journalArticlepeer-review

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Infrared-absorption measurements and first-principles quantum chemical calculations reveal that the initial oxidation of clean (formula presented) by (formula presented) involves the formation of a metastable silanone intermediate, (formula presented) containing two oxygen atoms presumably from the same (formula presented) molecule. Oxygen insertion into the surface silicon Si-Si backbonds is either thermally activated (1-eV barrier) or induced by atomic hydrogen exposure with formation of novel dihydride intermediates.

Original languageEnglish (US)
Pages (from-to)1-4
Number of pages4
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number16
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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