Abstract
Silicon carbide power field-effect transistors, including power vertical-junction FETs (VJFETs) and metal oxide semiconductor FETs (MOSFETs), are unipolar power switches that have been investigated for high-temperature and high-power-density applications. Recent progress and results will be reviewed for different device designs such as normally-OFF and normally-ON VJFETs, double-implanted MOSFETs, and U-shaped-channel MOSFETs. The advantages and disadvantages of SiC VJFETs and MOSFETs will be discussed. Remaining challenges will be identified.
Original language | English (US) |
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Pages (from-to) | 293-298 |
Number of pages | 6 |
Journal | MRS Bulletin |
Volume | 30 |
Issue number | 4 |
DOIs | |
State | Published - Apr 2005 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Physical and Theoretical Chemistry
Keywords
- Field-effect transistors
- MOSFETs
- Metal oxide semiconductor field-effect transistors
- Power switching
- Silicon carbide
- VJFETs
- Vertical-junction field-effect transistors