Silicon carbide power field-effect transistors

Jian H. Zhao

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

Silicon carbide power field-effect transistors, including power vertical-junction FETs (VJFETs) and metal oxide semiconductor FETs (MOSFETs), are unipolar power switches that have been investigated for high-temperature and high-power-density applications. Recent progress and results will be reviewed for different device designs such as normally-OFF and normally-ON VJFETs, double-implanted MOSFETs, and U-shaped-channel MOSFETs. The advantages and disadvantages of SiC VJFETs and MOSFETs will be discussed. Remaining challenges will be identified.

Original languageEnglish (US)
Pages (from-to)293-298
Number of pages6
JournalMRS Bulletin
Volume30
Issue number4
DOIs
StatePublished - Apr 2005

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Keywords

  • Field-effect transistors
  • MOSFETs
  • Metal oxide semiconductor field-effect transistors
  • Power switching
  • Silicon carbide
  • VJFETs
  • Vertical-junction field-effect transistors

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