Silicon-on-insulator technology as a platform for advanced electronics and photonics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon-on-Insulator (SOI) substrates are widely used in high performance microprocessors and in many other electronic applications. They are also an excellent platform for emerging photonic circuits. Fabrication of SOI will be reviewed here.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2008
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528612
DOIs
StatePublished - 2008
Externally publishedYes
EventFrontiers in Optics, FiO 2008 - Rochester, NY, United States
Duration: Oct 19 2008Oct 23 2008

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceFrontiers in Optics, FiO 2008
Country/TerritoryUnited States
CityRochester, NY
Period10/19/0810/23/08

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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