Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment

Yong Seung Kim, Namrata Bansal, Seongshik Oh

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Source oxidation of easily oxidizing elements such as Ca, Sr, Ba, and Ti in an oxidizing ambient leads to their flux instability and is one of the biggest problems in the multielemental oxide molecular beam epitaxy technique. Here, the authors report a new scheme that can completely eliminate the source oxidation problem: a self-gettering differential pump using the source itself as the pumping medium. The pump simply comprises a long collimator mounted in front of the source in extended port geometry. With this arrangement, the oxygen partial pressure near the source was easily maintained well below the source oxidation regime, resulting in a stabilized flux, comparable to that of an ultrahigh-vacuum environment. Moreover, this pump has a self-feedback mechanism that allows a stronger pumping effectiveness for more easily oxidizing elements, which is a desired property for eliminating the source oxidation problem.

Original languageEnglish (US)
Article number041505
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume29
Issue number4
DOIs
StatePublished - Jul 1 2011

Fingerprint

Molecular beam epitaxy
Oxides
Pumps
pumps
Oxidation
oxidation
oxides
Fluxes
Ultrahigh vacuum
Partial pressure
pumping
Oxygen
Feedback
collimators
Geometry
ultrahigh vacuum
partial pressure
molecular beam epitaxy
oxygen
geometry

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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Simple self-gettering differential-pump for minimizing source oxidation in oxide-MBE environment. / Kim, Yong Seung; Bansal, Namrata; Oh, Seongshik.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 29, No. 4, 041505, 01.07.2011.

Research output: Contribution to journalArticle

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