Solid electrolyte film humidity sensor

P. Shuk, M. Greenblatt

Research output: Contribution to journalArticlepeer-review

32 Scopus citations


An impedance-type, solid state thick-film humidity sensor based on a NASICON-type proton conductor, HZr2(PO4)3 has been developed and tested in a wide range of temperature (25-250°C) and relative humidity (2-100%). The film sensor showed enhanced sensitivity compared to the bulk sensor and fast and reproducible response (∼ 10-15 s), even at ambient temperature. Long-term tests of the film humidity sensors show relatively good agreement with the commercial humidity sensor, OMEGA-RH-20C at room temperature, and excellent agreement with commercial Vaisala-sensor at higher temperatures over several weeks. The sensor signal is dependent on the thickness, as well as on the microstructure of the film.

Original languageEnglish (US)
Pages (from-to)229-233
Number of pages5
JournalSolid State Ionics
StatePublished - Dec 1 1998

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics


  • Humidity sensor
  • Impedance
  • Thick film


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