Solid electrolyte film humidity sensor

P. Shuk; M. Greenblatt

doi:10.1016/s0167-2738(98)00376-2

Solid electrolyte film humidity sensor

P. Shuk, M. Greenblatt

School of Arts and Sciences, Chemistry & Chemical Biology

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

An impedance-type, solid state thick-film humidity sensor based on a NASICON-type proton conductor, HZr₂(PO₄)₃ has been developed and tested in a wide range of temperature (25-250°C) and relative humidity (2-100%). The film sensor showed enhanced sensitivity compared to the bulk sensor and fast and reproducible response (∼ 10-15 s), even at ambient temperature. Long-term tests of the film humidity sensors show relatively good agreement with the commercial humidity sensor, OMEGA-RH-20C at room temperature, and excellent agreement with commercial Vaisala-sensor at higher temperatures over several weeks. The sensor signal is dependent on the thickness, as well as on the microstructure of the film.

Original language	English (US)
Pages (from-to)	229-233
Number of pages	5
Journal	Solid State Ionics
Volume	113-115
DOIs	https://doi.org/10.1016/s0167-2738(98)00376-2
State	Published - Dec 1 1998

All Science Journal Classification (ASJC) codes

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

Keywords

Humidity sensor
Impedance
Thick film

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10.1016/s0167-2738(98)00376-2

Cite this

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title = "Solid electrolyte film humidity sensor",

abstract = "An impedance-type, solid state thick-film humidity sensor based on a NASICON-type proton conductor, HZr2(PO4)3 has been developed and tested in a wide range of temperature (25-250°C) and relative humidity (2-100%). The film sensor showed enhanced sensitivity compared to the bulk sensor and fast and reproducible response (∼ 10-15 s), even at ambient temperature. Long-term tests of the film humidity sensors show relatively good agreement with the commercial humidity sensor, OMEGA-RH-20C at room temperature, and excellent agreement with commercial Vaisala-sensor at higher temperatures over several weeks. The sensor signal is dependent on the thickness, as well as on the microstructure of the film.",

keywords = "Humidity sensor, Impedance, Thick film",

author = "P. Shuk and M. Greenblatt",

note = "Funding Information: This work is supported by State Funds and the Center for Advanced Food Technology (CAFT). CAFT is a New Jersey Commission on Science and Technology Center. The authors thank Dr. Alexei Ermakov for help with the electronic box.",

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doi = "10.1016/s0167-2738(98)00376-2",

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journal = "Solid State Ionics",

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T1 - Solid electrolyte film humidity sensor

AU - Shuk, P.

AU - Greenblatt, M.

N1 - Funding Information: This work is supported by State Funds and the Center for Advanced Food Technology (CAFT). CAFT is a New Jersey Commission on Science and Technology Center. The authors thank Dr. Alexei Ermakov for help with the electronic box.

PY - 1998/12/1

Y1 - 1998/12/1

N2 - An impedance-type, solid state thick-film humidity sensor based on a NASICON-type proton conductor, HZr2(PO4)3 has been developed and tested in a wide range of temperature (25-250°C) and relative humidity (2-100%). The film sensor showed enhanced sensitivity compared to the bulk sensor and fast and reproducible response (∼ 10-15 s), even at ambient temperature. Long-term tests of the film humidity sensors show relatively good agreement with the commercial humidity sensor, OMEGA-RH-20C at room temperature, and excellent agreement with commercial Vaisala-sensor at higher temperatures over several weeks. The sensor signal is dependent on the thickness, as well as on the microstructure of the film.

AB - An impedance-type, solid state thick-film humidity sensor based on a NASICON-type proton conductor, HZr2(PO4)3 has been developed and tested in a wide range of temperature (25-250°C) and relative humidity (2-100%). The film sensor showed enhanced sensitivity compared to the bulk sensor and fast and reproducible response (∼ 10-15 s), even at ambient temperature. Long-term tests of the film humidity sensors show relatively good agreement with the commercial humidity sensor, OMEGA-RH-20C at room temperature, and excellent agreement with commercial Vaisala-sensor at higher temperatures over several weeks. The sensor signal is dependent on the thickness, as well as on the microstructure of the film.

KW - Humidity sensor

KW - Impedance

KW - Thick film

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JO - Solid State Ionics

JF - Solid State Ionics

ER -

Solid electrolyte film humidity sensor

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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