SPM-based nanofabrication using a synchronization technique

Jiaqing Song, Zhongfan Liu, Chunzeng Li, Haifeng Chen, Huixin He

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

Various nanostructures have been fabricated on Au, Au/Pd, highly oriented pyrolytic graphite (HOPG) etc. based on mechanical machining and field evaporation by using the novel nanofabrication system developed in this laboratory. The basic idea is to transfer the given pattern into an encoded voltage pulse series, and then synchronize it with scanning probe microscopy (SPM) scanning. Depending on the method of applying voltage different lithography functions can be obtained: (1) electric field-based nanofabrication can be performed by imposing the voltage across the tip-substrate gap; or (2) nanomachining can be realized by using the voltage to adjust the setpoint force of AFM. The system has great versatility in creating arbitrary nanopatterns with well-controlled features. It is also very easy and fast to optimize the lithography parameters for a specific lithography mechanism. Field evaporation of gold atoms from AFM/STM tips and mechanical indentation by sharp AFM tips have been conducted to show the various functions of the developed nanofabrication system.

Original languageEnglish (US)
Pages (from-to)S715-S717
JournalApplied Physics A: Materials Science and Processing
Volume66
Issue numberSUPPL. 1
DOIs
StatePublished - 1998
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

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