Stable high brightness radio frequency driven micro-discharge lamps at 193 (ArF*) and 157 nm (F*2)

M. Salvermoser, Daniel Murnick

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Abstract

A stable discharge between two pin electrodes separated by several hundred micrometres in a high pressure rare gas (∼900 mbar) halogen (∼1 mbar) mixture is shown to yield continuous wave (CW) ultra violet (UV) and vacuum UV light sources. Lamps operating at 193 (ArF*) and 157 nm (F*2) have been demonstrated. Total CW output power in the UV was measured to be 30 for ArF* and 20 mW for F*2. The brightness of the light sources is estimated to be of the order of several W cm-2 sr-1. With direct current excitation, electrode lifetimes are limited to a few minutes due to fluorine salt deposits. However, using a radio frequency (RF) field to drive the discharge, the lifetime of the lamps increased to hundreds of hours. A one-dimensional model of the RF micro-discharge explaining the increase in electrode lifetime is presented. The technology described can be adapted to many other wavelengths and promises even higher powers in future.

Original languageEnglish (US)
Pages (from-to)180-184
Number of pages5
JournalJournal of Physics D: Applied Physics
Volume37
Issue number2
DOIs
Publication statusPublished - Jan 21 2004

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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