Straight crested wave analysis of quartz MEMS ring electroded mesa resonators

Yook Kong Yong, John Vig, Arthur Ballato

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations

Abstract

An analytical technique for designing high Q, thickness shear micro electromechanical, ring electroded mesa quartz resonators is proposed. The method is demonstrated using two-dimensional straight crested wave analysis. The design method is based on the two characteristics of a stable resonator: (a) The mode is energy trapped and relatively isolated from its supports, and (b) the motional impedance of the mode is low. The root mean squares of vibration displacements are employed to characterize the modes of vibration, and the thickness shear mode has a large rms u1 displacement in the X1 direction (digonal axis). The rms displacement is used to compare the energy trapping of the thickness shear mode as a function of the electrode and plate geometry. For each mode of vibration, the electric flux density D2 is calculated at the quartz to electrode interface to yield the electric current at the electrodes. Given a constant driving voltage, the magnitude of the electric current is inversely proportional to the motional impedance. Hence the electric current for a mode as a function of the electrode and plate geometry is employed as a further means for comparing the merits of different resonator designs. Results are shown for a 1 GHz inverted mesa AT-cut resonator.

Original languageEnglish (US)
Pages (from-to)999-1002
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Volume1
StatePublished - 2002
Event2002 IEEE Ultrasonics Symposium - Munich, Germany
Duration: Oct 8 2002Oct 11 2002

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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