Studies of fabrication parameters of textured storage media

L. M. Schiavone, H. G. Craighead, R. E. Howard, J. L. Shay

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Abstract

This paper describes the changes in morphology of microscopically textured germanium as a function of the fabrication parameters. A technique of sputtering aluminum from the upper electrode to provide uniform mask formation over the surface is described. This process allows fabrication of much larger area textured surfaces than was possible using previous techniques.

Original languageEnglish (US)
Pages (from-to)144-148
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume390
DOIs
Publication statusPublished - Sep 20 1983
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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