@inproceedings{01124afd237641c6bf2f43f7bb845535,
title = "Substrate engineering for 32nm and beyond",
abstract = "As Si CMOS technology progresses to more advanced nodes, classical scaling is no longer sufficient to follow Moore's law. A transition to engineered substrate technology is essential, as exemplified by SOI and its more advanced adaptations. The advances in engineered substrates and some key applications are described.",
author = "Nguyen, {Bich Yen} and Carlos Mazur{\'e} and George Celler",
year = "2009",
doi = "10.1149/1.3152965",
language = "English (US)",
isbn = "9781607682646",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "1",
pages = "91--98",
booktitle = "2009 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT",
edition = "1",
note = "2nd International Conference on Semiconductor Technology for Ultra Large Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT II ; Conference date: 05-07-2009 Through 10-07-2009",
}