The optimum conditions for synthesizing Nb and NbN films by rf cathode sputtering are investigated. The dependence of the critical temperature T//c on the film thickness which is observed for these films can be attributed to the proximity of the film to a surface layer with a relatively low value of T//c.
|Original language||English (US)|
|Number of pages||4|
|Journal||Soviet physics. Technical physics|
|State||Published - Jan 1 1980|
All Science Journal Classification (ASJC) codes
- Environmental Science(all)
- Earth and Planetary Sciences(all)