Surface smoothing process of YBa 2 Cu 3 O 7-x thin film for fabrication of superconducting multi-chip modules

S. Liang, Z. Q. Shi, C. Chern, Yicheng Lu, Ahmad Safari, P. Lu, B. H. Kear

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper, we report the development of surface smoothing process for YB 2 Cu 3 O 7-1x (YBCO) films. The SrTiO 3 / YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiO 3 film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased form 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STD. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM's.

Original languageEnglish (US)
Title of host publicationInterface Control of Electrical, Chemical, and Mechanical Properties
EditorsPeter Borgesen, Klavs F. Jensen, Roger A. Pollak
PublisherPubl by Materials Research Society
Number of pages5
ISBN (Print)1558992170
StatePublished - Jan 1 1994
Externally publishedYes
EventProceedings of the Fall 1993 MRS Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


OtherProceedings of the Fall 1993 MRS Meeting
CityBoston, MA, USA

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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