Surface smoothing process of YBa
                        2
                        Cu
                        3
                        O
                        7-x
                         thin film for fabrication of superconducting multi-chip modules

S. Liang; Z. Q. Shi; C. Chern; Yicheng Lu; Ahmad Safari; P. Lu; B. H. Kear

Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules

S. Liang, Z. Q. Shi, C. Chern, Yicheng Lu, Ahmad Safari, P. Lu, B. H. Kear

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, we report the development of surface smoothing process for YB ₂ Cu ₃ O _7-1x (YBCO) films. The SrTiO ₃ / YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiO ₃ film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased form 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STD. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM's.

Original language	English (US)
Title of host publication	Interface Control of Electrical, Chemical, and Mechanical Properties
Editors	Peter Borgesen, Klavs F. Jensen, Roger A. Pollak
Publisher	Publ by Materials Research Society
Pages	665-669
Number of pages	5
ISBN (Print)	1558992170
State	Published - Jan 1 1994
Externally published	Yes
Event	Proceedings of the Fall 1993 MRS Meeting - Boston, MA, USA Duration: Nov 29 1993 → Dec 3 1993

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	318
ISSN (Print)	0272-9172

Other

Other	Proceedings of the Fall 1993 MRS Meeting
City	Boston, MA, USA
Period	11/29/93 → 12/3/93

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Liang, S., Shi, Z. Q., Chern, C., Lu, Y., Safari, A., Lu, P., & Kear, B. H. (1994). Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules In P. Borgesen, K. F. Jensen, & R. A. Pollak (Eds.), Interface Control of Electrical, Chemical, and Mechanical Properties (pp. 665-669). (Materials Research Society Symposium Proceedings; Vol. 318). Publ by Materials Research Society.

Liang, S. ; Shi, Z. Q. ; Chern, C. ; Lu, Yicheng ; Safari, Ahmad ; Lu, P. ; Kear, B. H. / Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules Interface Control of Electrical, Chemical, and Mechanical Properties. editor / Peter Borgesen ; Klavs F. Jensen ; Roger A. Pollak. Publ by Materials Research Society, 1994. pp. 665-669 (Materials Research Society Symposium Proceedings).

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title = " Surface smoothing process of YBa 2 Cu 3 O 7-x thin film for fabrication of superconducting multi-chip modules ",

abstract = " In this paper, we report the development of surface smoothing process for YB 2 Cu 3 O 7-1x (YBCO) films. The SrTiO 3 / YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiO 3 film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased form 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STD. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM's. ",

author = "S. Liang and Shi, {Z. Q.} and C. Chern and Yicheng Lu and Ahmad Safari and P. Lu and Kear, {B. H.}",

year = "1994",

month = jan,

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language = "English (US)",

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series = "Materials Research Society Symposium Proceedings",

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pages = "665--669",

editor = "Peter Borgesen and Jensen, {Klavs F.} and Pollak, {Roger A.}",

booktitle = "Interface Control of Electrical, Chemical, and Mechanical Properties",

note = "Proceedings of the Fall 1993 MRS Meeting ; Conference date: 29-11-1993 Through 03-12-1993",

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Liang, S, Shi, ZQ, Chern, C, Lu, Y , Safari, A, Lu, P & Kear, BH 1994, Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules in P Borgesen, KF Jensen & RA Pollak (eds), Interface Control of Electrical, Chemical, and Mechanical Properties. Materials Research Society Symposium Proceedings, vol. 318, Publ by Materials Research Society, pp. 665-669, Proceedings of the Fall 1993 MRS Meeting, Boston, MA, USA, 11/29/93.

Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules . / Liang, S.; Shi, Z. Q.; Chern, C.; Lu, Yicheng ; Safari, Ahmad; Lu, P.; Kear, B. H.

Interface Control of Electrical, Chemical, and Mechanical Properties. ed. / Peter Borgesen; Klavs F. Jensen; Roger A. Pollak. Publ by Materials Research Society, 1994. p. 665-669 (Materials Research Society Symposium Proceedings; Vol. 318).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - In this paper, we report the development of surface smoothing process for YB 2 Cu 3 O 7-1x (YBCO) films. The SrTiO 3 / YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiO 3 film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased form 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STD. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM's.

AB - In this paper, we report the development of surface smoothing process for YB 2 Cu 3 O 7-1x (YBCO) films. The SrTiO 3 / YBCO interface characteristics were investigated as functions of polishing agent and polishing time. It was found that the 7% HF solution gave the best results both in structural and electrical properties. The leakage current through the SrTiO 3 film grown on polished YBCO was reduced to about 3 orders of magnitude. The dielectric constant was also increased form 110 to over 300. The superconducting properties of the YBCO bottom layer degraded insignificantly after undertaking the surface smoothing process and the overlayer growth of STD. This surface smoothing process without post treatment is suitable for subsequent growth of epitaxial STO films and the fabrication of MCM's.

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Liang S, Shi ZQ, Chern C, Lu Y , Safari A, Lu P et al. Surface smoothing process of YBa ₂ Cu ₃ O _7-x thin film for fabrication of superconducting multi-chip modules In Borgesen P, Jensen KF, Pollak RA, editors, Interface Control of Electrical, Chemical, and Mechanical Properties. Publ by Materials Research Society. 1994. p. 665-669. (Materials Research Society Symposium Proceedings).