Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

S. B. Lee, L. A.W. Robinson, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. G. Hasko, H. Ahmed

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Original languageEnglish (US)
Pages (from-to)325-328
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume3
Issue number4
DOIs
StatePublished - Aug 1 2003

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Keywords

  • Nanofabrication
  • Nanotube Evaporation Mask
  • Self-aligned Electrodes
  • Suspended Carbon Nanotubes

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